Cleanliness/contamination meeting, Friday, 1/23, 3 pm, CIS 101

Dear Labmembers --

The next Cleanliness/Contamination meeting will be Friday, 1/23, at 3 pm
in CIS 101. We'll review the process capability improvements that have
been brought up in previous meetings:

1. Quantifying contamination (lifetime testing/CV's).

2. Gold-contaminated RTA processing that is controlled and reproducible.

3. STS DRIE: Allow etching of substrates which may contain metals
(semiclean or gold), while ensuring against contamination of critical
clean processes.

4. "Semiclean" chrome deposition and etch.

5. Upcoming/expected ALD installation.

6. STS PECVD chamber clean improvement.

If you've got a process requirement relating to
cleanliness/contamination or equipment capability you like to discuss,
let us know and we'll include in the agenda.

Mary