Re: [labmembers] Badger equipment qualifications ...

John, thanks for helping everyone out with this. Kam

Sent from my iPhone

On Jan 4, 2013, at 12:03 PM, John Shott <shott@stanford.edu> wrote:

> SNF Lab Members:
>
> Happy New Year!
>
> As, you know, SNF has made the transition from Coral to Badger. While many of you will find that your equipment qualifications have been migrated from Coral to Badger, a significant number (I fear that it may be as high as 25% of you) will find that none of your equipment qualifications got migrated from Coral to Badger because university ID numbers did not match on both systems.
>
> If you fire up Badger and find that you have no asterisks behind the tools on which you should be qualified, you need to send me or any other SNF staff member the following information so that can extract your Coral equipment qualifications and enter them into Badger:
>
> 1. Your Coral login name.
> 2. Your Badger login name.
> 3. Your first and last name.
>
> Note: I am probably the best person to contact if you would like this done either today or tomorrow. I will be largely unavailable, however, on both Sunday and Monday so you should contact other SNF staff members on Monday if you miss this first offer.
>
> Thanks,
>
> John
>
> _______________________________________________
> labmembers mailing list
> labmembers@snf.stanford.edu
> http://snf.stanford.edu/mailman/listinfo/labmembers
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[labmembers] Badger equipment qualifications ...

SNF Lab Members:

Happy New Year!

As, you know, SNF has made the transition from Coral to Badger. While
many of you will find that your equipment qualifications have been
migrated from Coral to Badger, a significant number (I fear that it may
be as high as 25% of you) will find that none of your equipment
qualifications got migrated from Coral to Badger because university ID
numbers did not match on both systems.

If you fire up Badger and find that you have no asterisks behind the
tools on which you should be qualified, you need to send me or any other
SNF staff member the following information so that can extract your
Coral equipment qualifications and enter them into Badger:

1. Your Coral login name.
2. Your Badger login name.
3. Your first and last name.

Note: I am probably the best person to contact if you would like this
done either today or tomorrow. I will be largely unavailable, however,
on both Sunday and Monday so you should contact other SNF staff members
on Monday if you miss this first offer.

Thanks,

John

_______________________________________________
labmembers mailing list
labmembers@snf.stanford.edu
http://snf.stanford.edu/mailman/listinfo/labmembers

SNF: Shut Down for Winter Closure

Dear Labmembers --

SNF is officially closed for business. Doors reopen on Tuesday, Jan. 8
at 7 am.

Happy holidays and see you next year!

Your SNF Staff

--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang@stanford.edu
http://snf.stanford.edu

MEMS engineer opening in Northern Europe

Dear Labmembers,

Fairchild Semiconductor has two positions opening up for a MEMS foundry Engineer and MEMS Process Technician (or Jr. Engineer), to work in a fab in Northern Europe. The positions would require spending ~75% time in Northern Europe.

Please let me know if you are interested.

Shasha

Sloped Via Etch

Hi All,

Before we go on vacation, I just wanted to ask if anyone had measured Step Profile for O2, CHF3 Oxide Etch on mrc? I need to have sloped Via Etch for contaminated process. Because next step is evaporative dep for lift off. Any other suggestions would also be helpful.

-Jyotindra

Today's the Day - Winter (Holiday) Party from 1:00 to 3:00P on the 1st floor of the Allen Building

Dear All,

 

Today is our Winter (Holiday) party from 1:00P to 3:00P.  Please make time in your busy schedule to come down and have a drink (soda or water – you decide) with your co-workers / co lab members.

 

The fun begins on the first floor of the Allen building next to the Litho (yellow) area of the lab at 1:00P.

 

Thank you,

 

Maureen

 

From: Maureen Baran [mailto:mbaran@stanford.edu]
Sent: Monday, December 10, 2012 11:58 AM
To: cis-building@cis.stanford.edu; labmembers@snf.stanford.edu
Subject: Holiday Party - Tuesday, December 18th from 1:00 to 3:00
Importance: High

 

MARK YOUR CALENDAR!!!

 

Dear All,

 

We are planning a wonderful Holiday party, Tuesday, December 18^th from 1:00 to 3:00.  Please plan accordingly and give yourself some well-deserved time to enjoy a cup of cheer and more with your fellow Allen Building Dwellers / SNF Lab Members to reminisce about 2012 or your holiday plans.

 

Maureen

Continuing good HD oxide, even across a chamber clean

Recipe "HDP-SiO2"

We ran 6 wafers targeting 5000 A, 2 before a chamber plasma clean, 4 after.  Measurements this run were 55 pt Woollam.

The dep rate and uniformity continue to be ~1%.  The current dep rate estimate is 27.66 A/sec, consistent with previous values of

27.72 and 27.58.  Remember to include the 6 sec of "strike" in the rate calculations

The 1st wafer after the clean was 0.68% thicker than the averages (= 2 sigma of wafer avgs, nearly a significant difference).

Those few interested in this spreadsheet, please ask.

Douglas Tham participated in the depositions and measurements.

Thanks to Jim McVittie, Nancy and Elmer, and to SNF for a marvelous new tool.

Also to Ed Myers for the Woollam, making these measurements possible.

jim